Preparation and Properties of PZT Thin Films by Metal Alkoxides-DEA Method
نویسندگان
چکیده
منابع مشابه
architecture and engineering of nanoscale sculptured thin films and determination of their properties
چکیده ندارد.
15 صفحه اولInvestigation the dielectrical and electromechanical properties of PZT thin films
We have studied thedielectric and electromechanical properties of pure and doped Pb(Zr0.53Ti0.47)O3thin films.Samples were prepared bya sol-gel method and werecalcined at temperatures of 700oC for two hours in a Pb-rich atmosphere.It was observed a negligible effect occurs during the tetragonal–rhombohedral transition in the preparedpure and doped PZT thin films.The optimal amount of electrical...
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The piezoelectric properties of lead zirconate titanate (PZT) thin films deposited on thick silicon substrates and thin silicon membranes were investigated using optical interferometry. The effect of the geometrical constraints and clamping effects on the piezoelectric response is discussed. The study of the dielectric permittivity and the loss as a function of the amplitude of the alternating ...
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In this study, Pb(Zr0.52Ti0.48)O3/BiFeO3 [PZT/BFO] multilayer thin films were fabricated using the spin-coating method on a Pt(200 nm)/Ti(10 nm)/SiO2(100 nm)/p-Si(100) substrate alternately using BFO and PZT metal alkoxide solutions. The coating-and-heating procedure was repeated several times to form the multilayer thin films. All PZT/BFO multilayer thin films show a void-free, uniform grain s...
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Molybdenum thin films with 50 and 150 nm thicknesses were deposited on silicon substrates, using DC magnetron sputtering system, then post-annealed at different temperatures (200, 325, 450, 575 and 700°C) with flow oxygen at 200 sccm (standard Cubic centimeter per minute). The crystallographic structure of the films was obtained by means of x-ray diffraction (XRD) analysis. An atomic force micr...
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ژورنال
عنوان ژورنال: Journal of the Ceramic Society of Japan
سال: 1990
ISSN: 0914-5400,1882-1022
DOI: 10.2109/jcersj.98.754